Cov khoom siv txhuam khawv koob

  Hauv lub ntiaj teb ntawm kev tsim khoom precision thiab kev ua tiav nto,cerium oxideCov hmoov txhuam tau tshwm sim los ua cov khoom siv hloov pauv ntau yam. Nws cov yam ntxwv tshwj xeeb ua rau nws yog ib qho tseem ceeb hauv ntau yam kev siv txhuam, los ntawm cov nplaim ntawm cov iav tsom iav mus rau cov wafers thev naus laus zis siab hauv kev tsim khoom semiconductor.

  Lub tshuab ua kom ci ntsa iab ntawm cerium oxide yog kev sib xyaw ua ke ntawm cov txheej txheem tshuaj lom neeg thiab tshuab. Chemically,cerium oxide (CeO₂) siv qhov zoo ntawm cov xeev valence hloov pauv ntawm cov khoom cerium. Thaum muaj dej thaum lub sijhawm ua polishing, qhov chaw ntawm cov ntaub ntawv xws li iav (feem ntau yog tsim los ntawm silica, SiO₂) ua hydroxylated.CeO₂ces reacts nrog lub hydroxylated silica nto. Nws thawj tsim ib tug Ce - O - Si daim ntawv cog lus. Vim yog lub hydrolytic xwm ntawm lub iav nto, qhov no ntxiv hloov mus rau hauv ib tug Ce - O - Si (OH)₃daim ntawv cog lus.

   Mechanically, qhov nyuaj, zoo - grainedcerium oxidecov khoom me me ua haujlwm zoo li cov khoom me me abrasives. Lawv lub cev khawb cov qhov tsis sib xws me me ntawm cov khoom nto. Thaum lub polishing pad txav mus hla qhov chaw nyob rau hauv lub siab, lubcerium oxidecov khoom me me zom cov ntsiab lus siab, maj mam ua rau qhov chaw tiaj tus. Lub zog kho tshuab kuj ua lub luag haujlwm hauv kev rhuav tshem Si - O - Si bonds hauv cov qauv iav, pab txhawb kev tshem tawm cov khoom siv hauv daim ntawv ntawm cov khoom me me.Ib qho ntawm cov yam ntxwv tseem ceeb ntawmcerium oxidekev txhuam yog nws lub peev xwm los kho tus nqi txhuam. Thaum cov khoom nto ntxhib, qhovcerium oxideCov khoom me me ua rau cov khoom siv tawm sai heev. Thaum qhov chaw du, qhov nrawm ntawm kev txhuam tuaj yeem hloov kho, thiab qee zaum, txawm tias mus txog qhov "tsis txhob nres". Qhov no yog vim muaj kev sib cuam tshuam ntawm cerium oxide, lub ncoo txhuam, thiab cov khoom ntxiv hauv cov tshuaj txhuam. Cov khoom ntxiv tuaj yeem hloov kho cov tshuaj lom neeg ntawm qhov chaw thiab kev sib txuas ntawmcerium oxidecov khoom me me thiab cov khoom siv, tswj tau cov txheej txheem polishing zoo.